Effect of SiN_x diffusion barrier thickness on the structural properties and photocatalytic activity of TiO₂ films obtained by sol–gel dip coating and reactive magnetron sputtering

• Mohamed Nawfal Ghazzal,
• Eric Aubry,
• Nouari Chaoui and
• Didier Robert

Beilstein J. Nanotechnol. 2015, 6, 2039–2045, doi:10.3762/bjnano.6.207

• films obtained by each process was discussed. Keywords: diffusion barrier; photocatalysis; reactive sputtering; SiNx; sol–gel; titanium dioxide film; TiO2; Introduction Titanium dioxide thin films in active phase (mostly anatase) have been widely studied due to their ability to produce strong oxidant